Remarkably Volatile Copper(II) Complexes of N,N‘-Unsymmetrically Substituted 1,3-Diketimines as Precursors for Cu Metal Deposition via CVD or ALD
Author:
Affiliation:
1. Materials Science and Engineering, Central Research and Development, DuPont, Experimental Station, Wilmington, Delaware 19880-0328
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja051158s
Reference14 articles.
1. ALD (atomic layer deposition): Chen, L.; Chang, M. PCT Int. Appl. 03/044242, 2003.
2. Conformal copper deposition in deep trenches
3. Observation of specific intermolecular interactions in the X-ray crystal structure of Cu(I) (1,1,1,3,5,5,5-hepta-fluoropentane-2,4-dionato) (vinyltrimethylsilane)
4. Studies of metal chelates with the novel ligand 2,2,7-trimethyl-3,5-octanedione
5. Solubilities of Copper(II) and Chromium(III) .beta.-Diketonates in Supercritical Carbon Dioxide
Cited by 63 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Synthesis, characterization, volatility, and thermal stability of fluorinated copper(II) aminoalkoxide complexes as potential vapour deposition precursors;Canadian Journal of Chemistry;2024-08-20
2. The surface chemistry of the atomic layer deposition of metal thin films;Nanotechnology;2024-06-18
3. Perylenes, Porphyrins, and Other Large Dye Molecules for Molecular Layer Deposition;Advanced Materials Interfaces;2023-10-18
4. Preparation and Characterization of N,N′‐Dialkyl‐1,3‐propanedialdiminium Chlorides, N,N′‐Dialkyl‐1,3‐propanedialdimines, and Lithium N,N′‐Dialkyl‐1,3‐propanedialdiminates;Helvetica Chimica Acta;2023-05
5. Chemical control of spin–lattice relaxation to discover a room temperature molecular qubit;Chemical Science;2022
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3