1. Institute of Ion
Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR) e.V., P.O.
Box 510119, 01314 Dresden, Germany
2. State Key Laboratory of Electronic Thin Films and Integrated
Devices, University of Electronic Science and Technology of China, Chengdu 610054, China
3. Material
Systems for Nanoelectronics, Technische Universität Chemnitz, Reichenhainerstraße 70, 09107 Chemnitz, Germany
4. Institute
for Integrative Nanosciences, IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany
5. Institute of Semiconductors
and Microsystems, Technische Universität Dresden and Namlab GmbHNöthnitzer Strasse 64, 01187 Dresden, Germany