Highly Unsaturated Hydrogenated Silicon Clusters, SinHx (n = 3−10, x = 0−3), in Flash Pyrolysis of Silane and Disilane
Author:
Affiliation:
1. Department of Chemistry, University of California, Riverside, California 92521
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp012451r
Reference51 articles.
1. Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistry
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4. Formation of cationic silicon clusters in a remote silane plasma and their contribution to hydrogenated amorphous silicon film growth
5. An infrared study of SiH cluster formation in a-Si: H thin films
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