Thermochemistry and Kinetics of Silicon Hydride Cluster Formation during Thermal Decomposition of Silane
Author:
Affiliation:
1. Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, Minnesota 55455
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp983358e
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