Large Area, Facile Oxide Nanofabrication via Step-and-Flash Imprint Lithography of Metal–Organic Hybrid Resins

Author:

Dinachali Saman Safari12,Dumond Jarrett1,Saifullah Mohammad S. M.1,Ansah-Antwi Kwadwo Konadu13,Ganesan Ramakrishnan4,Thian Eng San2,He Chaobin15

Affiliation:

1. Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 3 Research Link, Singapore 117602, Republic of Singapore

2. Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117576, Republic of Singapore

3. Department of Electrical and Computer Engineering, National University of Singapore, E4-5-45, 4 Engineering Drive 3, Singapore 117583, Republic of Singapore

4. Department of Chemistry, Birla Institute of Technology & Science, Pilani−Hyderabad Campus, Jawahar Nagar, Shameerpet Mandal, Hyderabad 500 078, Andhra Pradesh, India

5. Department of Materials Science & Engineering, National University of Singapore, 21 Lower Kent Ridge Road, Singapore 119077, Republic of Singapore

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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