Dynamic Surface Site Activation: A Rate Limiting Process in Electron Beam Induced Etching
Author:
Affiliation:
1. School of Physics and Advanced Materials, University of Technology, Sydney, P.O. Box 123, Broadway, New South Wales 2007, Australia
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am402083n
Reference50 articles.
1. Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
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