Full Characterization of the Mechanical Properties of 11–50 nm Ultrathin Films: Influence of Network Connectivity on the Poisson’s Ratio-Reference-Cited by-同舟云学术

Full Characterization of the Mechanical Properties of 11–50 nm Ultrathin Films: Influence of Network Connectivity on the Poisson’s Ratio

Published:2017-03-01 Issue:4 Volume:17 Page:2178-2183
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Hernandez-Charpak Jorge N.¹^ORCID,Hoogeboom-Pot Kathleen M.¹²,Li Qing¹,Frazer Travis D.¹,Knobloch Joshua L.¹,Tripp Marie²,King Sean W.²,Anderson Erik H.³,Chao Weilun³,Murnane Margaret M.¹,Kapteyn Henry C.¹,Nardi Damiano¹²

Affiliation:

1. JILA and Department of Physics, University of Colorado, Boulder, Colorado 80309-0440, United States

2. Intel Corp., 2501 NW 229th Avenue, Hillsboro, Oregon 97124, United States

3. Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States

Funder

Gordon and Betty Moore Foundation

Basic Energy Sciences

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.6b04635

Reference34 articles.

1. Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies

2. Thickness dependence of nanofilm elastic modulus

3. Molecular dynamics study on size-dependent elastic properties of silicon nanoplates

4. Nondestructive Measurement of the Evolution of Layer-Specific Mechanical Properties in Sub-10 nm Bilayer Films

5. Measuring substrate-independent modulus of thin films

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