1. Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, and Department of Materials Science, Fudan University, Shanghai 200433, China
2. State Key Laboratory of Integrated Chips and Systems, Frontier Institute of Chip and System, Fudan University, Shanghai 200433, China
3. Institute of Semiconductors, South China Normal University, Guangzhou 510631, China
4. Zhangjiang Fudan International Innovation Center, Fudan University, Shanghai 200433, China