1. 3. Physikalisches Institut, University of Stuttgart, Pfaffenwaldring 57, Stuttgart 70569, Germany
2. Hahn-Schickard, Allmandring 9b, Stuttgart 70569, Germany
3. Institut für Mikrointegration, University of Stuttgart, Allmandring 9b, Stuttgart 70569, Germany
4. Application Technology Research Institute, Tokyo Gas Company, Ltd., Yokohama 230-0045, Japan
5. Advanced Materials Laboratory, Sumitomo Electric Industries, Ltd., Itami 664-0016, Japan
6. Takasaki Advanced Radiation Research Institute, National Institutes for Quantum and Radiological Science and Technology, Takasaki 370-1292, Japan
7. Faculty of Pure and Applied Sciences, University of Tsukuba, Tsukuba 305-8573, Japan