1. Department of Materials Science and Engineering, National Chiao Tung University, No. 1001, University Road, East District, Hsinchu City 30010, Taiwan
2. Material and Chemical Research Laboratories, Nanotechnology Research Center, Industrial Technology Research Institute, No. 195, Section 4, Chung Hsing Road, Chutung, Hsinchu City 31040, Taiwan
3. EM Application Department of EM Business Unit, JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
4. Department of Materials Science and Engineering, National Cheng Kung University, No. 1, University Road, Tainan City 70101, Taiwan
5. Center for the Intelligent Semiconductor Nano-System Technology Research, National Chiao Tung University, Hsinchu 300, Taiwan
6. Frontier Research Center on Fundamental and Applied Sciences of Matters, National Tsing Hua University, Hsinchu 300, Taiwan