Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology-Reference-Cited by-同舟云学术

Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

Author:

Yuan Pengyu¹²³,Wu Jason Y.¹,Ogletree D. Frank²,Urban Jeffrey J.²^ORCID,Dames Chris¹,Ma Yanbao³^ORCID

Affiliation:

1. Department of Mechanical Engineering, University of California, Berkeley, Berkeley, California 94720, United States

2. The Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California 94720, United States

3. Department of Mechanical Engineering, University of California, Merced, Merced, California 95343, United States

Funder

U.S. Department of Energy

U.S. Department of Defense

National Science Foundation

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

Reference62 articles.

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