Hollow Microtube Resonators via Silicon Self-Assembly toward Subattogram Mass Sensing Applications

Author:

Kim Joohyun1,Song Jungki1,Kim Kwangseok1,Kim Seokbeom1,Song Jihwan1,Kim Namsu2,Khan M. Faheem3,Zhang Linan4,Sader John E.5,Park Keunhan6,Kim Dongchoul1,Thundat Thomas3,Lee Jungchul1

Affiliation:

1. Department of Mechanical Engineering, Sogang University, Seoul, 121-742, Republic of Korea

2. Department of Mechanical Design and Production Engineering, Konkuk University, Seoul 143-701, Republic of Korea

3. Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta T6G 2V4, Canada

4. Department of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou, 310018, China

5. School of Mathematics and Statistics, The University of Melbourne, Victoria, 3010, Australia

6. Department of Mechanical Engineering, University of Utah, Salt Lake City, Utah 84112, United States

Funder

National Research Foundation of Korea

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

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