1. Department of Materials Science and Engineering, National Yang Ming Chiao Tung University, No. 1001, University Road, East
District, Hsinchu City 30010, Taiwan
2. Department of Materials Science and Engineering, Feng Chia University, No. 100, Wenhwa Road, Seatwen District, Taichung City 407802, Taiwan
3. EM Application Department of EM Business Unit, JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
4. Center for the Intelligent Semiconductor Nanosystem Technology Research, National Yang Ming Chiao Tung University, No. 1001, University Road, East District, Hsinchu City 30010, Taiwan