Geometric Tuning of Stress in Predisplaced Silicon Nitride Resonators
Author:
Affiliation:
1. Department of Physics, Technical University Munich, Garching 85748, Germany
2. Munich Center for Quantum Science and Technology (MCQST), Munich, 80799, Germany
3. Institute for Advanced Study, Technical University Munich, Garching, 85748, Germany
Funder
FP7 People: Marie-Curie Actions
Deutsche Forschungsgemeinschaft
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.2c00613
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