1. Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Straße 6, 07745 Jena, Germany
2. Institute of Solid State Physics, Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena, Germany
3. Group of Displays and Photonics Applications, Carlos III University of Madrid, Avda. de la Universidad, 30, Leganés, 28911 Madrid, Spain
4. Vistec Electron Beam GmbH, 07743 Jena, Germany
5. Fraunhofer-Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Straße 7, 07745 Jena, Germany