Deposition of Copper Particles and Films by the Displacement of Two Immiscible Supercritical Phases and Subsequent Reaction-Reference-Cited by-同舟云学术

Deposition of Copper Particles and Films by the Displacement of Two Immiscible Supercritical Phases and Subsequent Reaction

Published:2009-02-13 Issue:5 Volume:21 Page:913-924
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Kim Jaehoon¹,Taylor Douglas¹,DeYoung James¹,McClain James B.¹,DeSimone Joseph M.¹,Carbonell Ruben G.¹

Affiliation:

1. Department of Chemical and Biomolecular Engineering, North Carolina State University, Raleigh, North Carolina 27606-7905, Micell Technologies, 7516 Precision Drive, Raleigh, North Carolina 27617, Department of Chemistry, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599-3290, and Supercritical Fluid Research Laboratory, Energy and Environment Research Division, Korea Institute of Science and Technology (KIST), 39-1 Hawolgok-dong, Seongbuk-gu, Seoul, 136-791, Korea

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm802659j

Reference72 articles.

1. The Chemistry of Metal CVD

2. Advanced multilayer metallization schemes with copper as interconnection metal

3. The future of interconnection technology

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Uniform deposition of ternary chalcogenide nanoparticles onto mesoporous TiO2 film using liquid carbon dioxide-based coating;Thin Solid Films;2014-08

2. Supercritical alcohols as solvents and reducing agents for the synthesis of reduced graphene oxide;Carbon;2013-11

3. Metals – Gas-Phase Deposition and Applications;Comprehensive Inorganic Chemistry II;2013

4. The Breadth and Intensity of Supercritical Particle Formation Research with an Emphasis on Publication and Patent Disclosures;Industrial & Engineering Chemistry Research;2010-07-02

5. Deposition of palladium catalyzed copper films by the displacement of two immiscible supercritical phases and subsequent reaction;Journal of Materials Chemistry;2010