Theoretical Investigation of the Kinetics for the Reactions of H with GeH(4-n)Fn (n = 0, 1, 2, 3)
Author:
Affiliation:
1. School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100, P. R. China
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp021035j
Reference32 articles.
1. Germane discharge chemistry
2. Photosensitive amorphous silicon films deposited from hexafluorodisilane
3. Plasma chemistry in silane/germane and disilane/germane mixtures
4. Ab initio and kinetic calculations for the reactions of H with SiH(4-n)Fn (n=1–3)
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1. Energetics and Mechanism of the Hydrogenation of XHn for Group IV to Group VII Elements X;Journal of Chemical Theory and Computation;2012-10-10
2. Mechanism and direct dynamics studies for the reaction of monoethylsilane EtSiH3 with atomic O (3P);Chemical Physics Letters;2005-05
3. Mechanism and Interpolated Variational Transition State Rate Constant for the Reaction of Atomic H with Monoethylsilane;The Journal of Physical Chemistry A;2003-07-24
4. Theoretical Investigation of the Kinetics for the Reactions of Atomic Hydrogen with GeH(4-n)Cln (n = 0, 1, 2, 3);The Journal of Physical Chemistry A;2003-04-09
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