1. Key Lab of Information Materials of Sichuan Province & School of Electrical and Information Engineering, South-west University for Nationalities, Chengdu 610041, and International Center for Material Physics, Chinese Academy of Sciences, Shenyang 110016, P. R. China
2. Plasma Sources and Applications Center, NIE and Institute of Advanced Studies, Nanyang Technological University, 1 Nanyang Walk, Singapore 637616
3. CSIRO Materials Science and Engineering, P.O. Box 218, Lindfield, New South Wales 2070, Australia
4. Centre for Quantum Information Science and Security, Macquarie University, New South Wales 2109, Australia
5. NIE and Institute of Advanced Studies, Nanyang Technological University, 1 Nanyang Walk, Singapore 637616