Ultrasonic Spray Deposition of Metal Oxide Films on High Aspect Ratio Microstructures for Three-Dimensional All-Solid-State Li-ion Batteries
Author:
Affiliation:
1. Institute for Materials Research, Inorganic and Physical Chemistry, and imec, division imomec, Hasselt University, Martelarenlaan 42, 3500 Hasselt, Belgium
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Energy Engineering and Power Technology,Fuel Technology,Renewable Energy, Sustainability and the Environment,Chemistry (miscellaneous)
Link
https://pubs.acs.org/doi/pdf/10.1021/acsenergylett.6b00449
Reference22 articles.
1. 3-D Integrated All-Solid-State Rechargeable Batteries
2. 3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries
3. Planar and 3D deposition of Li4Ti5O12 thin film electrodes by MOCVD
4. Chemical Vapor Deposition of Lithium Phosphate Thin-Films for 3D All-Solid-State Li-Ion Batteries
5. (Invited) All-Solid-State Batteries: A Challenging Route towards 3D Integration
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