1. College of Mechanical and Electrical Engineering, Guizhou Minzu University, Guiyang550025, China
2. Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing100029, China
3. Department of Physics, Semiconductor Photonics Research Center, Xiamen University, Xiamen361005, China
4. School of Integrated Circuits, University of CAS, Beijing100049, China