1. School of Microelectronics, Dalian University of Technology, No. 321 Tuqiang Road, Dalian 116620, China
2. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, No. 2 Linggong Road, Dalian 116024, China
3. Jilin Provincial Key Laboratory of Architectural Electricity & Comprehensive Energy Saving, School of Electrical Engineering and Computer, Jilin Jianzhu University, Changchun 130118, China