Effect of Native Oxide on Stress in Silicon Nanowires: Implications for Nanoelectromechanical Systems-Reference-Cited by-同舟云学术

Effect of Native Oxide on Stress in Silicon Nanowires: Implications for Nanoelectromechanical Systems

Published:2022-09-15 Issue:9 Volume:5 Page:13276-13285
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Nasr Esfahani Mohammad¹^ORCID,Zare Pakzad Sina²^ORCID,Li Taotao³^ORCID,Li XueFei³,Tasdemir Zuhal⁴,Wollschläger Nicole⁵,Leblebici Yusuf⁶⁷,Alaca B. Erdem²⁸⁹^ORCID

Affiliation:

1. School of Physics, Engineering and Technology, University of York, York YO10 5DD, U.K.

2. Department of Mechanical Engineering, Koç University, Sariyer, Istanbul 34450, Turkey

3. School of Electronic Science and Engineering, Nanjing University, Nanjing, Jiangsu, 210093, China

4. Laboratory of Micro and Nanotechnology, Paul Scherrer Institute, Forschungsstrasse 111, Villigen PSI CH-5232, Switzerland

5. Department 5.1: Materialography, Fractography and Aging of Technical Materials, Bundesanstalt für Materialforschung und -prüfung (BAM), Unter den Eichen 87, Berlin 12205, Germany

6. Microelectronic Systems Laboratory, Swiss Federal Institute of Technology─Lausanne (EPFL), Lausanne, CH-1015, Switzerland

7. Rectorate, Sabanci University, Tuzla, Istanbul 34956, Turkey

8. n2STAR-Koç University Nanofabrication and Nanocharacterization Center for Scientific and Technological Advanced Research, Koç University, Sariyer, Istanbul 34450, Turkey

9. Koç University Surface Technologies Research Center (KUYTAM), Koç University, Sariyer, Istanbul 34450, Turkey

Funder

T?rkiye Bilimsel ve Teknolojik Arastirma Kurumu

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsanm.2c02983

Reference69 articles.

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