Atomic Plane Misorientation Assisted Crystalline Quality Improvement in Epitaxial Growth of AlN on a Nanopatterned Sapphire (0001) Surface for Deep Ultraviolet Photoelectric Devices

Author:

Deng Yong12ORCID,Xie Nan34,Hu Wenyu5ORCID,Ma Zhenyu1,Xu Fujun4ORCID,Chen Longqing6,Qiu Wenbin6ORCID,Zhao Lin1,Tao Hong1,Wu Bo1ORCID,Huang Yi1,Ma Jian1,Wang Xiaoyi178,Zhang Xuqi1,Qiu Yang2,Cui Xudong7,Jin Chaoyuan8910,Chauvat Marie-Pierre11,Ruterana Pierre11,Walther Thomas12ORCID

Affiliation:

1. College of Electronic and Information, Southwest Minzu University, State Ethnic Affairs Commission, Chengdu 610047, China

2. Pico center, SUSTech Core Research Facilities, Southern University of Science and Technology, Shenzhen 518055, China

3. Institute of Integrated Circuits, China Center for Information Industry Development, Beijing 100048, China

4. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China

5. Department of Physics, Southern University of Science and Technology, Shenzhen 518056, China

6. Key Laboratory of Radiation Physics and Technology of Ministry of Education, Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064, China

7. Institute of Chemical Materials, China Academy of Engineering Physics, Mianyang 621900, China

8. Institute of Microelectronics and Nanoelectronics, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310007, China

9. Zhejiang Laboratory, Hangzhou 311121, China

10. International Joint Innovation Center, Zhejiang University, Haining 314400, China

11. CIMAP, UMR 6252, CNRS-ENSICAEN-CEA-UCBN, 6 Boulevard Maréchal Juin, 14050 Caen Cedex 04, France

12. Department of Electronic & Electrical Engineering, University of Sheffield, Mappin St., Sheffield S1 3JD, U.K.

Funder

Ministry of Science and Technology of the People's Republic of China

Central University Basic Research Fund of China

Science, Technology and Innovation Commission of Shenzhen Municipality

Major Scientific Project of Zhejiang Laboratory

National Natural Science Foundation of China

Natural Science Foundation of Zhejiang Province

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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