A Chemical Vapor Deposition Route to Epitaxial Superconducting NbTiN Thin Films
Author:
Affiliation:
1. Université Grenoble Alpes, CNRS, Grenoble INP, SIMaP, F-38000 Grenoble, France
2. INAC/SPSMS, CEA-Grenoble, F-38000 Grenoble, France
3. Université Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France
Funder
Agence Nationale de la Recherche
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.7b00490
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1. Superconducting single photon detectors made by local oxidation with an atomic force microscope
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5. Structural and mechanical properties of Nb1−xTixN thin films deposited by rf magnetron sputtering
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