1. Alibaba Quantum Laboratory Alibaba Group Hangzhou Zhejiang 311121 P. R. China
2. Westlake Center for Micro/Nano Fabrication Westlake University Hangzhou Zhejiang 310024 P. R. China
3. Instrumentation and Service Center for Physical Sciences Westlake University Hangzhou Zhejiang 310024 P. R. China
4. Hefei National Laboratory for Physical Sciences at the Microscale University of Science and Technology of China Hefei Anhui 230026 P. R. China
5. Alibaba Quantum Laboratory Alibaba Group USA Bellevue WA 98004 USA