Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition-Reference-Cited by-同舟云学术

Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition

Published:2023-07-22 Issue:15 Volume:35 Page:6097-6108
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Lasonen Valtteri¹^ORCID,Vihervaara Anton¹^ORCID,Popov Georgi¹^ORCID,Tois Eva²,Mester Lars³,Karimi Mohammad⁴,Ilarionova Yoana⁴^ORCID,Jafari Jam Reza⁴,Sundqvist Jonas⁴,Ritala Mikko¹^ORCID

Affiliation:

1. Department of Chemistry. University of Helsinki, A.I.Virtasen aukio 1, Helsinki, FIN 00014, Finland

2. ASM Microchemistry Oy, Pietari Kalmin katu 3, Helsinki 00560, Finland

3. Attocube systems AG, Eglfinger Weg 2, Haar 85540, Germany

4. AlixLabs AB, Ole Römers Väg 1, Lund 223 63, Sweden

Funder

Academy of Finland

Helsingin Yliopisto

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.3c01185

Reference39 articles.

1. Cramming More Components Onto Integrated Circuits

2. Top-down nanomanufacturing

3. Review on Micro- and Nanolithography Techniques and their Applications

4. Perspective: New process technologies required for future devices and scaling

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