Double-Layer Imprint Lithography on Wafers and Foils from the Submicrometer to the Millimeter Scale
Author:
Affiliation:
1. Molecular Nanofabrication Group, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
2. Holst Centre/TNO, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am101187n
Reference29 articles.
1. Nanoimprint lithography: An old story in modern times? A review
2. Recent progress in nanoimprint technology and its applications
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5. Roller nanoimprint lithography
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