Rapid Synthesis of Nanoporous Conformal Coatings via Plasma-Enhanced Sequential Infiltration of a Polymer Template
Author:
Affiliation:
1. Materials Science and Engineering Department, University of North Texas, 1155 Union Circle, Denton, Texas 76203, United States
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acsomega.7b01314
Reference42 articles.
1. A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
2. Etch properties of resists modified by sequential infiltration synthesis
3. Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
4. Effects of thermal treatment on porous amorphous fluoropolymer film with a low dielectric constant
5. Functional nanomaterials based on block copolymer self-assembly
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