2 in. Bulk β-Ga2O3 Single Crystals Grown by EFG Method with High Wafer-Scale Quality

Author:

Feng Ganrong12,Li Shan12ORCID,Tian Yawen2,Qi Song2,Guo Daoyou3ORCID,Tang Weihua12

Affiliation:

1. College of Integrated Circuit Science and Engineering & National and Local Joint Engineering Laboratory for RF Integration and Micro-Packing Technologies, Nanjing University of Posts and Telecommunications, Nanjing 210023, China

2. Beijing GAO Semiconductor Co. Ltd., Beijing 101407, China

3. Center for Optoelectronics Materials and Devices & Key Laboratory of Optical Field Manipulation of Zhejiang Province, Department of Physics, Zhejiang Sci-Tech University, Hangzhou 310018, China

Funder

National Key Research and Development Program of China

Natural Science Foundation of Jiangsu Province

Nanjing University of Posts and Telecommunications

National Natural Science Foundation of China

Jiangsu Provincial Team of Innovation and Entrepreneurship

Natural Science Foundation of Jiangsu Higher Education Institutions

Publisher

American Chemical Society (ACS)

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