Studies of 2.45 GHz Microwave Induced Plasma Abatement of CF4
Author:
Affiliation:
1. BOC Edwards, Exhaust Gas Management, Kenn Business Park, Kenn Road, BS21 6TH Clevedon, U.K.
Publisher
American Chemical Society (ACS)
Subject
Environmental Chemistry,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/es0263846
Reference30 articles.
1. Abatement of C[sub 2]F[sub 6] in rf and microwave plasma reactors
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4. An Atmospheric-Pressure Plasma Process for C2F6 Removal
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