Two-Stage Aerosol Synthesis of Titanium Nitride TiN and Titanium Oxynitride TiOxNy Nanopowders of Spherical Particle Morphology-Reference-Cited by-同舟云学术

Two-Stage Aerosol Synthesis of Titanium Nitride TiN and Titanium Oxynitride TiOxNy Nanopowders of Spherical Particle Morphology

Published:2006-05-27 Issue:13 Volume:18 Page:3122-3129
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Drygaś Mariusz¹,Czosnek Cezary¹,Paine Robert T.¹,Janik Jerzy F.¹

Affiliation:

1. Faculty of Fuels and Energy, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland, and Department of Chemistry, University of New Mexico, Albuquerque, New Mexico 87131

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm060522z

Reference44 articles.

1. A Room-Temperature Synthesis of Titanium Nitride Hollow Spheres

2. Synthesis of thin films by atmospheric pressure chemical vapor deposition using amido and imido titanium(IV) compounds as precursors

3. Chemical vapor deposition of titanium, zirconium, and hafnium nitride thin films

4. Correlation between processing and properties of TiOxNy thin films sputter deposited by the reactive gas pulsing technique

5. Lower Voltage Operation of a Phase Change Memory Device with a Highly Resistive TiON Layer

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