Fluorinated Organic−Inorganic Hybrid Mold as a New Stamp for Nanoimprint and Soft Lithography-Reference-Cited by-同舟云学术

Fluorinated Organic−Inorganic Hybrid Mold as a New Stamp for Nanoimprint and Soft Lithography

Published:2005-09-03 Issue:21 Volume:21 Page:9390-9392
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Choi Dae-Geun¹,Jeong Jun-ho¹,Sim Young-suk¹,Lee Eung-sug¹,Kim Woo-Soo¹,Bae Byeong-Soo¹

Affiliation:

1. Nano-Mechanical Systems Research Center, Korea Institute of Machinery & Materials, 171 Jang-dong, Yuseong-gu, Daejeon, 305-343 Republic of Korea, and Laboratory of Optical Materials and Coating, Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon, 305-701 Republic of Korea

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la0513205

Reference27 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. (c) Guo, L. J.J. Phys. D: Appl. Phys.2004,37, R123−R141.

3. SOFT LITHOGRAPHY

4. Capillary Force Lithography

Cited by 65 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material;Nanomaterials;2023-07-08

2. Thermal Transport Properties of Na2X (X = O and S) Monolayers;Coatings;2022-09-02

3. Recent Advances in Laser‐Induced Graphene: Mechanism, Fabrication, Properties, and Applications in Flexible Electronics;Advanced Functional Materials;2022-08-07

4. Soft thermal nanoimprint with a 10 nm feature size;Soft Matter;2019

5. Tailored Functional Surfaces Using Nanoparticle and Protein “Nanobrick” Coatings;Langmuir;2018-12-13