Vapor Pressures of the Copper and Yttrium β-Diketonate MOCVD Precursors
Author:
Affiliation:
1. SRI International, Menlo Park, California 94025
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/je0003445
Reference13 articles.
1. RECENT DEVELOPMENTS IN CONDUCTOR PROCESSING OF HIGH IRREVERSIBILITY FIELD SUPERCONDUCTORS
2. Chemical Vapor Deposition of Copper for Multilevel Metallization
3. Sublimation Behavior of Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanoid(III)
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