Adsorption Features of Phthalates and Organophosphorus Compounds on Silicon Wafers
Author:
Affiliation:
1. Aix-Marseille Université, CNRS, Laboratoire Chimie Environnement, FRE 3416, 3 Place Victor Hugo (case 29), Marseille cedex 03, France
2. CNRS, FRE 3416, 13331, Marseille cedex 03, France
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie301501b
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