Profile Evolution for Conformal Atomic Layer Deposition over Nanotopography-Reference-Cited by-同舟云学术

Profile Evolution for Conformal Atomic Layer Deposition over Nanotopography

Published:2010-07-14 Issue:8 Volume:4 Page:4637-4644
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Cleveland Erin R.¹²,Banerjee Parag¹²,Perez Israel¹²,Lee Sang Bok³⁴,Rubloff Gary W.¹⁵

Affiliation:

1. Department of Materials Science and Engineering

2. Institute for Systems Research

3. and Department of Chemistry & Biochemistry, University of Maryland, College Park, Maryland 20742

4. Graduate School of Nanoscience and Technology (WCU), Korea Advanced Institute of Science and Technology, 335 Gwahangno, Yuseong-gu, Daejeon 305-701, Korea

5. Institute for Research in Electronics and Applied Physics

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/nn1009984

Reference30 articles.

1. Nanotubular metal–insulator–metal capacitor arrays for energy storage

2. MnO2/Poly(3,4-ethylenedioxythiophene) Coaxial Nanowires by One-Step Coelectrodeposition for Electrochemical Energy Storage

3. Mesoporous catalytic membranes: Synthetic control of pore size and wall composition

4. Atomic layer deposition of palladium films on Al2O3 surfaces

5. Fabrication and gas sensing performance of parallel assemblies of metal oxide nanotubes supported by porous aluminum oxide membranes

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