Effects of Extreme Ultraviolet Radiation on Transition Metal Dichalcogenides: Investigation of Physical and Electrical Properties-Reference-Cited by-同舟云学术

Effects of Extreme Ultraviolet Radiation on Transition Metal Dichalcogenides: Investigation of Physical and Electrical Properties

Published:2024-08-14 Issue: Volume: Page:
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Kao Man-Yun¹²³⁴,Hsu Che-Hao¹²³⁴,Huang Yu-Qi¹²³⁴,Hsu Yu-Chieh¹²³⁴,Liu Ming-Jin¹²³⁴,Chen Chieh-Ting¹²³⁴,Lai Po-Chien¹²³⁴,Lu Ming-Yen¹²³⁴^ORCID,Wu Pin-Jiun⁵^ORCID,Chueh Yu-Lun¹²³⁴⁶^ORCID

Affiliation:

1. Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan

2. Colleage of Semiconductor Research, National Tsing-Hua University, Hsinchu 30013, Taiwan

3. Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan

4. Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea

5. National Synchrotron Radiation Research Center, Hsinchu 300092, Taiwan

6. Center for Nanotechnology, Materials Science, and Microsystem, National Tsing-Hua University, Hsinchu 30013, Taiwan

Funder

National Science and Technology Council

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.4c00585

Reference37 articles.

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3. Large-area integration of two-dimensional materials and their heterostructures by wafer bonding

4. Transistors based on two-dimensional materials for future integrated circuits

5. Two-Dimensional Transition Metal Dichalcogenides under Electron Irradiation: Defect Production and Doping