Bulk Micromachining of Si by Annealing-Driven Magnetically Guided Metal-Assisted Chemical Etching-Reference-Cited by-同舟云学术

Bulk Micromachining of Si by Annealing-Driven Magnetically Guided Metal-Assisted Chemical Etching

Published:2020-01-02 Issue:1 Volume:2 Page:260-267
ISSN:2637-6113
Container-title:ACS Applied Electronic Materials
language:en
Short-container-title:ACS Appl. Electron. Mater.

Author:

Kim Tae Kyoung¹,Bae Jee-Hwan²,Kim Juyoung²,Kim Yu-Chan³,Jin Sungho¹,Chun Dong Won²^ORCID

Affiliation:

1. Materials Science and Engineering, University of California at San Diego, 9500 Gilman Drive, La Jolla, California 92093, United States

2. Advanced Analysis Center, Korea Institute of Science and Technology (KIST) 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul 02792, Republic of Korea

3. Center for Biomaterials, Biomedical Research Institute, Korea Institute of Science and Technology (KIST) 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul 02792, Republic of Korea

Funder

National Research Foundation of Korea

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/acsaelm.9b00746

Reference34 articles.

1. Surface chemistry of Luminescent Silicon Nanocrystallites

2. Synthesis of Large-Area Silicon Nanowire Arrays via Self-Assembling Nanoelectrochemistry

3. Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

4. Silicon Nanowires for Photovoltaic Solar Energy Conversion

5. Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching

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