Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching-Reference-Cited by-同舟云学术

Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

Published:2008-10-28 Issue:11 Volume:8 Page:3799-3802
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Choi W. K.¹,Liew T. H.¹,Dawood M. K.¹,Smith Henry I.²,Thompson C. V.³,Hong M. H.⁴

Affiliation:

1. Advanced Materials for Micro- and Nano-Systems Programme, Singapore−MIT Alliance, Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576

2. Advanced Materials for Micro- and Nano-Systems Programme, Singapore−MIT Alliance, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

3. Advanced Materials for Micro- and Nano-Systems Programme, Singapore−MIT Alliance, Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139

4. ECE-DSI Laser Microprocessing Laboratory, Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl802129f

Reference20 articles.

1. Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport

2. Controlled Growth and Structures of Molecular-Scale Silicon Nanowires

3. Resistivity measurements of intentionally and unintentionally template-grown doped silicon nanowire arrays

4. Controlled Growth of Si Nanowire Arrays for Device Integration

5. Multiple ZnO Nanowires Field-Effect Transistors

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