Developing an Efficient Forward Design Method for Co Post-CMP Cleaning Formulations Based on Nanoparticle Removal Mechanisms
Author:
Affiliation:
1. State Key Laboratory of Tribology in Advanced Equipment, Tsinghua University, Beijing 100084, China
Funder
Tsinghua University
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsaelm.3c01315
Reference39 articles.
1. Huang, H.; Hsieh, H.; Jeng, S.; Tao, H.; Cao, M.; Mii, Y. A new enhancement layer to improve copper interconnect performance. IEEE International Interconnect Technology Conference, 2010; pp 1–3.
2. Mont, F.; Zhang, X.; Wang, W.; Kelly, J.; Standaert, T.; Quon, R.; Ryan, E. Cobalt interconnect on same copper barrier process integration at the 7nm node. IEEE International Interconnect Technology Conference, 2017; pp 1–3.
3. Wang, L.; Mishra, A.; Cruz, B.; Wen, R. Cobalt polishing slurries for 10 nm and beyond. Proceedings of International Conference on Planarization/CMP Technology, 2014; pp 233.
4. Nogami, T.; Maniscalco, J.; Madan, A.; Flaitz, P.; DeHaven, P.; Parks, C.; Tai, L.; Lawrence, B.; Davis, R.; Murphy, R.; Shaw, T.; Cohen, S.; Hu, C.K.; Cabral, C.; Chiang, S.; Kelly, J.; Zaitz, M.; Schmatz, J.; Choi, S.; Tsumura, K.; Penny, C.; Chen, H.C.; Canaperi, D.; Vo, T.; Ito, F.; Straten, O.; Simon, A.; Rhee, S.H.; Kim, B.Y.; Bolom, T.; Ryan, V.; Ma, P.; Ren, J.; Aubuchon, J.; Fine, J.; Kozlowski, P.; Spooner, T.; Edelstein, D. CVD Co and its application to Cu damascene interconnections. IEEE International Interconnect Technology Conference, 2010; pp 1–3.
5. Direct Copper Plating on Ultra-Thin Sputtered Cobalt Film in an Alkaline Bath
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