Deep-UV-Enhanced Approach for Low-Temperature Solution Processing of IZO Transistors with High-k AlOx/YAlOx Dielectric
Author:
Affiliation:
1. Soft Transducers Laboratory, Ecole Polytechnique Fédérale de Lausanne, 2000 Neuchâtel, Switzerland
2. Empa-Swiss Federal Laboratories for Materials Science and Technology, 8600 Dübendorf, Switzerland
Funder
Eidgen?ssische Technische Hochschule Z?rich
Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Electrochemistry,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acsaelm.0c00444
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