1. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden 01328, Germany
2. Institute of Applied Physics, Technical University of Dresden, Dresden 01062, Germany
3. IHP−Leibniz-Institut für innovative Mikroelektronik, Im Technologiepark 25, Frankfurt (Oder) 15236, Germany
4. Center for Advancing Electronics Dresden (CFAED), Technical University of Dresden, 01062 Dresden, Germany
5. Institute of Electronics at the Bulgarian Academy of Sciences, 72, Tsarigradsko Chausse Blvd., Sofia 1784, Bulgaria