Performance Enhancement of ZnGa2O4 Metal Oxide-Semiconductor Field-Effect Transistors Grown via Metal Organic Chemical Vapor Deposition on Sapphire Substrates

Author:

Singh Anoop Kumar1,Yen Chao-Chun12,Huang Shi-Min1,Chou Hsin-Yu1,Shen Junhong1,Huang Shiming1,Yadlapalli Bharath Kumar1,Huang Chiung-Yi34,Wuu Dong-Sing15ORCID

Affiliation:

1. Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan

2. Aluminum & Specialty Alloy Development Section, New Materials Research & Development Department, China Steel Corporation, Chung Kang Rd., Hsiao Kang, Kaohsiung 81233, Taiwan

3. Institute of Electronics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan

4. Department of Electronic Engineering, Lunghwa University of Science and Technology, Taoyuan 33306, Taiwan

5. Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 54561, Taiwan

Funder

National Science and Technology Council

Publisher

American Chemical Society (ACS)

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