Chemical Vapor Deposition of GaP and GaAs Thin Films From [nBu2Ga(μ-EtBu2)2GanBu2] (E = P or As) and Ga(PtBu2)3

Author:

Cheng Fei1,George Kathryn1,Hector Andrew L.1,Jura Marek2,Kroner Anna3,Levason William1,Nesbitt John4,Reid Gillian1,Smith David C.4,Wilson James W.4

Affiliation:

1. School of Chemistry, University of Southampton, Southampton SO17 1BJ, U.K.

2. ISIS, STFC, Harwell Innovation Campus, Didcot, Oxfordshire, OX11 0QX, U.K.

3. Diamond Light Source plc, Harwell Innovation Campus, Didcot, Oxfordshire OX11 0DE, U.K.

4. School of Physics and Astronomy, University of Southampton, Southampton SO17 1BJ, U.K.

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Reference29 articles.

1. Malik, M. A.; O’Brien, P.InGroup 13 Metals Aluminium, Gallium, Indium and Thallium,2nd ed;Aldridge, S., Downs, A. J., Eds.Wiley;London, 2011, p612.

2. The Use of Metal-Organics in the Preparation of Semiconductor Materials

3. Precursor Chemistry for Main Group Elements in Semiconducting Materials

4. Supercritical Fluid−Liquid−Solid Synthesis of Gallium Phosphide Nanowires

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