1. State
Key Laboratories of Transducer Technology, Shanghai Institute of Technical
Physics, Chinese Academy of Sciences, Shanghai 200083, People’s Republic of China
2. Key
Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute
of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, People’s Republic of China
3. University
of Chinese
Academy of Sciences, Beijing 100039, People’s Republic of China
4. Nanolithography
and Application Research Group, State Key Lab of ASIC and System,
School of Information Science and Engineering, Fudan University, Shanghai 200433, People’s Republic of China