Vapor Pressures of (3-(Dimethylamino)propyl)dimethylindium, (tert-Butylimino)bis(diethylamino)cyclopentadienyltantalum, and (tert-Butylimino)tris(ethylmethylamino)tantalum-Reference-Cited by-同舟云学术

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Vapor Pressures of (3-(Dimethylamino)propyl)dimethylindium, (tert-Butylimino)bis(diethylamino)cyclopentadienyltantalum, and (tert-Butylimino)tris(ethylmethylamino)tantalum

Published:2014-11-05 Issue:12 Volume:59 Page:4179-4183
ISSN:0021-9568
Container-title:Journal of Chemical & Engineering Data
language:en
Short-container-title:J. Chem. Eng. Data

Author:

Morávek Pavel¹²,Pangrác Jiří²,Fulem Michal¹²,Hulicius Eduard²,Růžička Květoslav¹

Affiliation:

1. Department of Physical Chemistry, Institute of Chemical Technology, Prague, Technická 5, CZ-166 28 Prague 6, Czech Republic

2. Department of Semiconductors, Institute of Physics, Academy of Sciences of the Czech Republic, v. v. i., Cukrovarnická 10, CZ-162 00 Prague 6, Czech Republic

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/je500816c

Reference30 articles.

1. Vapor pressure of metal organic precursors

3. Vapor pressure of germanium precursors

4. Vapor Pressure of Selected Organic Iodides

5. Measurement of vapour pressure of In-based metalorganics for MOVPE

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