Atomic Layer Deposition of LiF Thin Films from Lithd, Mg(thd)2, and TiF4 Precursors
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, FI-00014 Helsinki, Finland
2. Department of Physics, University of Jyväskylä, P.O. Box 35, FI-40014 Jyväskylä, Finland
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm400046w
Reference28 articles.
1. Epitaxy of LiF on Ge(100)
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5. Photoluminescence from colour centres generated in lithium fluoride thin films and crystals by extreme-ultraviolet irradiation
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