Acid-Labile, Chain-Scission Polymer Systems Used as Positive-Tone Photoresists Developable in Supercritical CO2
Author:
Affiliation:
1. School of Chemical and Biomolecular Engineering and Department of Materials Science and Engineering, Cornell University, Ithaca, New York
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm703580f
Reference28 articles.
1. Practical Approaches to Green Solvents
2. Supercritical Fluid Growth of Porous Carbon Nanocages
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4. One-Step Chemoenzymatic Synthesis of Poly(ε-caprolactone-block-methyl methacrylate) in Supercritical CO2
5. Removal of Copper from Silicon Surfaces Using Hexafluoroacetylacetone (hfacH) Dissolved in Supercritical Carbon Dioxide
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