Block Copolymer Templated Etching on Silicon-Reference-Cited by-同舟云学术

Block Copolymer Templated Etching on Silicon

Published:2007-01-13 Issue:2 Volume:7 Page:464-469
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Qiao Yinghong¹,Wang Dong¹,Buriak Jillian M.¹

Affiliation:

1. Department of Chemistry, University of Alberta and the National Institute for Nanotechnology, National Research Council, Edmonton, AB T6G 2G2, Canada

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl0627801

Reference47 articles.

1. Engineering atomic and molecular nanostructures at surfaces

2. Self-aligned self assembly of multi-nanowire silicon field effect transistors

3. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes

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