Control of the Microdomain Orientation in Block Copolymer Thin Films with Homopolymers for Lithographic Application-Reference-Cited by-同舟云学术

Control of the Microdomain Orientation in Block Copolymer Thin Films with Homopolymers for Lithographic Application

Published:2007-04-28 Issue:11 Volume:23 Page:6404-6410
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Kitano Hirofumi¹,Akasaka Satoshi¹,Inoue Tomohiro¹,Chen Feng¹,Takenaka Mikihito¹,Hasegawa Hirokazu¹,Yoshida Hiroshi¹,Nagano Hideki¹

Affiliation:

1. Department of Polymer Chemistry, Graduate School of Engineering, Kyoto University, Nishikyo-ku, Kyoto 615-8510, Materials Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, and Development & Technology Center, Hitachi Maxell Ltd., Tsukubamirai, Ibaraki 300-2496, Japan

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la0637014

Reference30 articles.

1. Patterning with block copolymer thin films

2. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes

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