Gas Cluster Ion Beam Cleaning of CVD-Grown Graphene for Use in Electronic Device Fabrication
Author:
Affiliation:
1. National Physical Laboratory, Hampton Road, Teddington, TW11 0LW, United Kingdom
2. Graphenea, Paseo Mikeletegi 83, 20009, San Sebastián, Spain
3. Thermo Fisher Scientific, Birches Industrial Estate, East Grinstead RH19 1UB, United Kingdom
Funder
European Commission
National Measurement System of the UK department of Business, Energy and Industrial Strategy
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsanm.1c00519
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1. Electric Field Effect in Atomically Thin Carbon Films
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